EP 0000311 B1 19800723 - CRYOGENIC PUMP
Title (en)
CRYOGENIC PUMP
Publication
Application
Priority
FR 7720554 A 19770705
Abstract (en)
[origin: US4198829A] This invention relates to cryopumps, and consists in the incorporation of walls for trapping by condensation exemplified by outer faces of partitions, and walls for trapping by adsorption, exemplified by inner faces of these partitions. These walls define a confined area in the closed position, in which the adsorbent is isolated from condensable gases. Once these gases have been condensed on the said outer faces, the partitions are opened to place the adsorbent layers in communication with the remainder of the pumping enclosure. The invention is applicable to the production of high and uncontaminated vacua (in particular for the production of thin films).
IPC 1-7
IPC 8 full level
B01D 8/00 (2006.01); F04B 37/08 (2006.01)
CPC (source: EP US)
B01D 8/00 (2013.01 - EP US); F04B 37/08 (2013.01 - EP US); Y10S 417/901 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 0000311 A1 19790110; EP 0000311 B1 19800723; DE 2860052 D1 19801113; FR 2396879 A1 19790202; FR 2396879 B1 19800801; JP S5420008 U 19790208; JP S5933911 Y2 19840920; US 4198829 A 19800422
DOCDB simple family (application)
EP 78400040 A 19780628; DE 2860052 T 19780628; FR 7720554 A 19770705; JP 9186978 U 19780705; US 91994478 A 19780628