EP 0000586 B1 19811202 - METHOD FOR REJUVENATING ION SOURCES
Title (en)
METHOD FOR REJUVENATING ION SOURCES
Publication
Application
Priority
US 81938877 A 19770727
Abstract (en)
[origin: US4135094A] {PG,1 Ion sources which become coated with insulative materials are rejuvenated by forming the repeller electrode in the ion source of gold and bombarding such repeller electrode with ions to sputter the gold onto the coated surfaces to render them conductive again. Gold sputtering is accomplished by bombarding the gold repeller electrode with inert argon ions.
IPC 1-7
IPC 8 full level
G01N 27/62 (2006.01); H01J 3/04 (2006.01); H01J 27/02 (2006.01); H01J 27/20 (2006.01); H01J 49/10 (2006.01); H01J 49/14 (2006.01)
CPC (source: EP US)
H01J 49/10 (2013.01 - EP US); H01J 49/14 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB SE
DOCDB simple family (publication)
EP 0000586 A1 19790207; EP 0000586 B1 19811202; CA 1107234 A 19810818; DE 2861400 D1 19820128; IT 1097553 B 19850831; IT 7826143 A0 19780726; JP S5434890 A 19790314; JP S588550 B2 19830216; US 4135094 A 19790116
DOCDB simple family (application)
EP 78100528 A 19780727; CA 308036 A 19780725; DE 2861400 T 19780727; IT 2614378 A 19780726; JP 9102578 A 19780727; US 81938877 A 19770727