Global Patent Index - EP 0004065 A3

EP 0004065 A3 19791003 - APPARATUS AND METHOD FOR FOCUSSING AND ANALYZING A CHARGED PARTICLE BEAM

Title (en)

APPARATUS AND METHOD FOR FOCUSSING AND ANALYZING A CHARGED PARTICLE BEAM

Publication

EP 0004065 A3 19791003 (DE)

Application

EP 79100669 A 19790306

Priority

AT 162178 A 19780307

Abstract (en)

[origin: EP0004065A2] 1. A device for focussing and analyzing charged corpuscular beams, in particular secondary ion beams, with at least or - if required - two electrostatic focussing lenses, an entrance diaphragm, an electrostatic sector field lens, an exit diaphragm, a correcting lens and a detector arranged in the direction of the beam, characterized by the fact that an electrostatic projecting lens (11) with at least two (13, 14), but preferably three electrically polarizable diaphragms (12, 13, 14) with their apertures on one axis is arranged in the path of the charged corpuscular beam to be analyzed between the sector field lens (6) and the exit diaphragm (15).

IPC 1-7

H01J 39/34

IPC 8 full level

H01J 49/00 (2006.01); H01J 49/02 (2006.01); H01J 49/48 (2006.01)

CPC (source: EP)

H01J 49/022 (2013.01); H01J 49/067 (2013.01); H01J 49/48 (2013.01)

Citation (search report)

  • US 3679896 A 19720725 - WARDLY GEORGE A
  • FR 2317650 A1 19770204 - MINNESOTA MINING & MFG [US]
  • ZEITSCHRIFT FUER PHYSIK, Vol. 214 1968, Berlin D. ANDRICK et al.: "Kurzlebige Compoundzustande in der Niederenergetischen Elektron-Helium-Streuung" Seiten 388-401 * Seite 392, Zeile 35 - Seite 394, Zeile 3; Figur 2 *
  • JOURNAL OF APPLIED PHYSICS, Vol. 48, No. 7, Juli 1977 New York K. WIESEMANN et al.: "Energy Analysis of H-ions from a hollowdischarge duoplasmatron" Seiten 2668-2672 * Seiten 2668-2669, Absatz "Experimental set up", figur 2 *
  • JOURNAL OF PHYSICS B. ATOMIC AND MOLECULAR PHYSICS, Vol. 8, No. 7, 1975 London M. EYB und H. HOFMANN: "Elastic Electron-Alkali Atom Scattering Near the first Inelestic Threshold" Seiten 1095-1108. * Seiten 1096-1098 Absatz 2.1; Figur 1 *

Designated contracting state (EPC)

DE FR GB

DOCDB simple family (publication)

EP 0004065 A2 19790919; EP 0004065 A3 19791003; EP 0004065 B1 19830223; AT 376044 B 19841010; AT A162178 A 19840215; DE 2964883 D1 19830331

DOCDB simple family (application)

EP 79100669 A 19790306; AT 162178 A 19780307; DE 2964883 T 19790306