EP 0041228 A3 19820526 - MANUFACTURING PROCESS OF AN ELECTRON BEAM OUTPUT WINDOW

Title (en)

MANUFACTURING PROCESS OF AN ELECTRON BEAM OUTPUT WINDOW

Publication

EP 0041228 A3 19820526 (DE)

Application

EP 81104065 A 19810527

Priority

DE 3020809 A 19800602

Abstract (en)

[origin: US4331505A] A method of manufacturing an electron emission aperture of an electron beam generator using the associated electron beam generator and the cathode of the generator which emits electrons at a plurality of points, as well as aperture lenses, and employing electron projection lithography. The associated electron beams are used to burn the emission spot pattern of the associated cathode into an electron-sensitive layer of a blank of a perforated mask, through holes in the mask are produced by etching at the burn spots, individual aperture spots corresponding to the emission spot pattern are burned into an electron-sensitive layer of a blank of the aperture through the through holes using the perforated mask and the associated electron beams, and the blind holes near the spots are etched allowing their individual apertures and a supporting grid to remain.

IPC 1-7

H01J 37/04; H01J 37/317; H01J 9/14

IPC 8 full level

H01J 9/14 (2006.01); G21K 5/00 (2006.01); H01J 9/02 (2006.01); H01J 33/04 (2006.01); H01J 37/301 (2006.01); H01J 37/317 (2006.01)

CPC (source: EP US)

B82Y 10/00 (2013.01 - EP US); B82Y 40/00 (2013.01 - EP US); H01J 37/301 (2013.01 - EP US); H01J 37/3174 (2013.01 - EP US); H01J 2237/164 (2013.01 - EP US); H01J 2237/31786 (2013.01 - EP US)

Citation (search report)

[Y] US 3906392 A 19750916 - MANN MICHAEL M
[Y] FR 2066038 A5 19710806 - LICENTIA GMBH
[A] DE 2501885 A1 19760722 - LICENTIA GMBH
[AD] IEEE TRANSACTIONS ON ELECTRON DEVICES, Band ED-22, Nr. 7, Juli 1975 New York, US L.N. HEYNICK et al.: "Projection Electron Lithography Using Aperture Lenses", Seiten 399-409

Designated contracting state (EPC)

CH DE FR GB IT SE

DOCDB simple family (publication)

EP 0041228 A2 19811209; EP 0041228 A3 19820526; EP 0041228 B1 19840919; DD 159384 A5 19830302; DE 3020809 A1 19811210; DE 3166138 D1 19841025; JP S5723453 A 19820206; JP S5832898 B2 19830715; US 4331505 A 19820525

DOCDB simple family (application)

EP 81104065 A 19810527; DD 23050281 A 19810602; DE 3020809 A 19800602; DE 3166138 T 19810527; JP 8553281 A 19810602; US 26894881 A 19810601