Global Patent Index - EP 0045058 A3

EP 0045058 A3 19850417 - METHOD OF MAKING LAYERED CAPACITORS, AND APPARATUS THEREFOR

Title (en)

METHOD OF MAKING LAYERED CAPACITORS, AND APPARATUS THEREFOR

Publication

EP 0045058 A3 19850417 (DE)

Application

EP 81105804 A 19810722

Priority

DE 3028123 A 19800724

Abstract (en)

[origin: ES8206081A1] Method for producing laminated capacitors, including a rotatable drum having a periphery and recesses formed therein, carriers disposed on the drum in the recesses defining a setting range on the periphery of the drum, a first vacuum chamber for metal layer deposition, a second vacuum chamber for insulating material layer deposition, means for supplying a vapor jet through a path in the first vacuum chamber and a shielding mask for shielding the carriers from the vapor jet, which includes shielding off the carriers from the vapor jet with the shielding mask before vapor deposition, alternatingly conducting the carriers on the drum through the first and second vacuum chambers, removing the shielding mask from the vapor jet path after a given number of revolutions of the drum for the period during which the setting range on the periphery of drum rotates through the first zone, and reintroducing the shielding mask in the vapor jet path after the last metal layer has been deposited during the rotation through the setting range, and a device for carrying out the method.

IPC 1-7

H01G 4/30

IPC 8 full level

B65G 47/84 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01); H01G 4/015 (2006.01); H01G 4/18 (2006.01); H01G 4/30 (2006.01); H01G 13/00 (2013.01)

CPC (source: EP US)

C23C 14/24 (2013.01 - EP US); C23C 14/56 (2013.01 - EP US); H01G 13/00 (2013.01 - EP US)

Citation (search report)

Designated contracting state (EPC)

DE FR GB IT SE

DOCDB simple family (publication)

EP 0045058 A2 19820203; EP 0045058 A3 19850417; EP 0045058 B1 19871028; BR 8104762 A 19820413; DE 3028123 A1 19820225; DE 3176502 D1 19871203; ES 504216 A0 19820616; ES 8206081 A1 19820616; JP S5762525 A 19820415; JP S6326531 B2 19880530; US 4378382 A 19830329

DOCDB simple family (application)

EP 81105804 A 19810722; BR 8104762 A 19810723; DE 3028123 A 19800724; DE 3176502 T 19810722; ES 504216 A 19810723; JP 11583981 A 19810723; US 28382181 A 19810716