Global Patent Index - EP 0053150 A1

EP 0053150 A1 19820609 - METHOD FOR MANUFACTURING A THIN LAYER WITH ORIENTATED STRUCTURE, DEVICE FOR IMPLEMENTING SUCH METHOD AND PRODUCTS OBTAINED THEREBY.

Title (en)

METHOD FOR MANUFACTURING A THIN LAYER WITH ORIENTATED STRUCTURE, DEVICE FOR IMPLEMENTING SUCH METHOD AND PRODUCTS OBTAINED THEREBY.

Title (de)

VERFAHREN ZUR HERSTELLUNG EINER DÜNNEN SCHICHT MIT GERICHTETER STRUKTUR, VORRICHTUNG ZUR DURCHFÜHRUNG DIESES VERFAHRENS UND DURCH DIESE VERFAHREN HERGESTELLTE PRODUKTE.

Title (fr)

PROCEDE DE FABRICATION D'UNE COUCHE MINCE A STRUCTURE ORIENTEE, DISPOSITIF POUR LA MISE EN OEUVRE DE CE PROCEDE ET PRODUITS OBTENUS.

Publication

EP 0053150 A1 19820609 (FR)

Application

EP 81901530 A 19810609

Priority

  • CH 456580 A 19800613
  • CH 495280 A 19800627
  • CH 668780 A 19800906

Abstract (en)

[origin: WO8103669A1] In said method, a magnetic and/or electric field is applied to the layer being deposited and/or cooled, for example by means of polar parts (82). The device further comprises means for depositing the thin layer (80), complementary processing and depositing means (73, 83 and 84) allowing particularly the production of photo-voltaic cells.

Abstract (fr)

Dans ce procede, on applique a la couche en cours de depot et/ou de refroidissement un champ magnetique et/ou electrique, par exemple au moyen de pieces polaires (82). Le dispositif comporte en outre des moyens de depot de la couche mince (80), des moyens de depots et de traitement complementaires (73, 83 et 84) permettant notamment la fabrication de photopiles.

IPC 1-7

C23C 11/00; C23C 13/00; C23C 15/00; H01L 31/02; H01L 31/18

IPC 8 full level

C23C 2/26 (2006.01); C23C 14/18 (2006.01); C23C 14/22 (2006.01); C23C 14/58 (2006.01); C23C 16/453 (2006.01); C23C 16/56 (2006.01); H01L 31/18 (2006.01)

CPC (source: EP)

C23C 14/18 (2013.01); C23C 14/22 (2013.01); C23C 14/58 (2013.01); C23C 14/5806 (2013.01); C23C 14/584 (2013.01); C23C 16/453 (2013.01); C23C 16/56 (2013.01); H01L 31/182 (2013.01); H01L 31/1876 (2013.01); Y02E 10/546 (2013.01); Y02P 70/50 (2015.11)

Designated contracting state (EPC)

DE FR GB NL

DOCDB simple family (publication)

WO 8103669 A1 19811224; EP 0053150 A1 19820609

DOCDB simple family (application)

CH 8100063 W 19810609; EP 81901530 A 19810609