EP 0067987 A4 19830406 - PLANAR VACUUM SEAL FOR ISOLATING AN AIR BEARING.
Title (en)
PLANAR VACUUM SEAL FOR ISOLATING AN AIR BEARING.
Title (de)
FLACHE LUFTLEERE DICHTUNG ZUR ISOLIERUNG EINES LUFTKISSENS.
Title (fr)
JOINT D'ETANCHEITE PLAT SOUS VIDE POUR L'ISOLATION D'UN PALIER PNEUMATIQUE.
Publication
Application
Priority
US 10720779 A 19791226
Abstract (en)
[origin: WO8202235A1] A graded planar seal is provided between opposing planar surfaces (62, 64) for isolating an air bearing in a vacuum environment (16). The air bearing (22, 24, 26, 62, 64) supports a structure (20) such as a semiconductor mask or wafer and functions in a vacuum environment without severely degrading the quality of the vacuum. The air bearing is isolated from the vacuum by the use of the graded planar seal which establishes a pressure gradient from the level of the air which supports the air bearing (22, 24, 26, 62, 64) to the level of the vacuum environment (16). The gradient is established across the seal by evacuating gas through successive orifices (42, 44. 46, 52) in opposing planar members (12, 14).
IPC 1-7
IPC 8 full level
F16C 29/02 (2006.01); F16C 32/06 (2006.01); F16J 15/00 (2006.01); F16J 15/40 (2006.01); H01J 37/18 (2006.01); H01L 21/30 (2006.01)
CPC (source: EP)
F16C 29/025 (2013.01); F16C 32/0603 (2013.01); F16C 33/748 (2013.01); F16J 15/006 (2013.01); F16J 15/406 (2013.01); H01J 37/18 (2013.01); F16C 2300/62 (2013.01)
Citation (search report)
- US 4118042 A 19781003 - BOOTH REX
- FR 1152577 A 19580220 - THOMSON HOUSTON COMP FRANCAISE
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 8202235 A1 19820708; EP 0067987 A1 19830105; EP 0067987 A4 19830406; JP S58500134 A 19830120
DOCDB simple family (application)
US 8001718 W 19801223; EP 81900255 A 19801223; JP 50043581 A 19801223