EP 0095372 A3 19860319 - OPTIMUM SURFACE CONTOUR FOR CONDUCTIVE HEAT TRANSFER WITH A THIN FLEXIBLE WORKPIECE

Title (en)

OPTIMUM SURFACE CONTOUR FOR CONDUCTIVE HEAT TRANSFER WITH A THIN FLEXIBLE WORKPIECE

Publication

EP 0095372 A3 19860319 (EN)

Application

EP 83302955 A 19830523

Priority

US 38166882 A 19820525
US 38167082 A 19820525

Abstract (en)

[origin: EP0095372A2] Conductive heat transfer between a thin deformable workpiece 72 and a heat sink 70 is optimized by imposing a load L over the workpiece resulting in a uniform contact pressure distribution in said workpiece which is also the maximum stress consistent with the elastic properties of the workpiece. The surface 71 of the heat sink is given a contour determined by these criteria for a thin circular disk clamped thereto.

IPC 1-7

H01J 37/20; H01J 37/317; H01J 37/02

IPC 8 full level

H01J 37/317 (2006.01); H01L 21/687 (2006.01)

CPC (source: EP)

H01J 37/317 (2013.01); H01L 21/68721 (2013.01); H01L 21/68735 (2013.01)

Citation (search report)

[A] EP 0016579 A1 19801001 - VARIAN ASSOCIATES [US]
[A] GB 1443215 A 19760721 - MULLARD LTD
[A] PATENTS ABSTRACTS OF JAPAN, vol. 1, no. 44, 27th April 1977, page 2713 E 76; & JP - A - 51 140 577 (FUJITSU K.K.) 12-03-1976

Designated contracting state (EPC)

CH DE FR GB LI

DOCDB simple family (publication)

EP 0095372 A2 19831130; EP 0095372 A3 19860319; EP 0095372 B1 19890830; DE 3380505 D1 19891005

DOCDB simple family (application)

EP 83302955 A 19830523; DE 3380505 T 19830523