EP 0112491 A2 19840704 - Alarm and control system for semiconductor manufacturing plants.
Title (en)
Alarm and control system for semiconductor manufacturing plants.
Title (de)
Alarm- und Steuerungssystem einer Herstellungsanlage für Halbleiter.
Title (fr)
Système d'alarme et de commande pour installation de fabrication de semi-conducteurs.
Publication
Application
Priority
JP 20688982 A 19821127
Abstract (en)
This invention relates to an alarm and control system which detects leak of processing gas or a fire occurring in manufacturing process in very large-scale integrated circuit manufacturing plants, and adequately controls fire protection system such as fire extinguishing system and the manufacturing process.
IPC 1-7
IPC 8 full level
G08B 17/00 (2006.01); A62C 3/00 (2006.01); G08B 17/117 (2006.01)
CPC (source: EP)
G08B 17/117 (2013.01)
Designated contracting state (EPC)
BE CH DE FR GB IT LI
DOCDB simple family (publication)
EP 0112491 A2 19840704; EP 0112491 A3 19870916; EP 0112491 B1 19900110; DE 3381098 D1 19900215; ES 527815 A0 19850416; ES 8505124 A1 19850416; JP S5998294 A 19840606
DOCDB simple family (application)
EP 83111571 A 19831119; DE 3381098 T 19831119; ES 527815 A 19831125; JP 20688982 A 19821127