EP 0121707 B1 19880907 - METHOD FOR POLISHING AMORPHOUS ALUMINUM OXIDE
Title (en)
METHOD FOR POLISHING AMORPHOUS ALUMINUM OXIDE
Publication
Application
Priority
US 47412083 A 19830310
Abstract (en)
[origin: EP0121707A2] The method comprises the chemical-mechanical polishing of amorphous aluminum oxide surfaces to a high degree of perfection. The aluminum oxide surfaces are continuously wetted with a water-citric acid slurry containing a sort abrasive material. The continuously wiping of the aluminum oxide surface is accomplished with a firm surface (16) using pressure while maintaining a relative movement between the aluminum oxide surface and the firm surface (16) to remove the water reacted aluminum oxide product from the high points of the aluminum oxide surface. This method is continued until a high degree of perfection of the surface is accomplished. The slurry is typically composed of colloidal silicon dioxide dispersed in water containing citric acid.
IPC 1-7
IPC 8 full level
B24B 37/00 (2006.01); B24B 37/04 (2006.01); C01F 7/02 (2006.01); C09K 3/14 (2006.01)
CPC (source: EP)
B24B 37/04 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0121707 A2 19841017; EP 0121707 A3 19851009; EP 0121707 B1 19880907; DE 3473846 D1 19881013; JP S59170175 A 19840926; JP S5953317 B2 19841224
DOCDB simple family (application)
EP 84101834 A 19840222; DE 3473846 T 19840222; JP 22456383 A 19831130