EP 0128169 A4 19850827 - CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE AND LIKE FILMS.
Title (en)
CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE AND LIKE FILMS.
Title (de)
CHEMISCHER NIEDERSCHLAG VON TITANNITRID UND SONSTIGEN FILMEN IN DAMPFPHASE.
Title (fr)
DEPOT CHIMIQUE DE NITRURE DE TITANE ET D'AUTRES FILMS EN PHASE DE VAPEUR.
Publication
Application
Priority
US 44334082 A 19821122
Abstract (en)
[origin: WO8402128A1] A novel process for placing a thin film of a metal nitride, e.g. titanium nitride, on a glass substrate (10) by mixing a metal halide with a reducing gas like ammonia, preferably within a range of from about 250oC to 320oC, and then reacting the gases at (18) the surface of a glass substrate heated to, e.g., about 400oC to about 700oC to form the film on the glass.
IPC 1-7
IPC 8 full level
C03C 17/22 (2006.01); C23C 16/34 (2006.01); G02B 1/10 (2006.01)
CPC (source: EP US)
C03C 17/225 (2013.01 - EP US); C23C 16/34 (2013.01 - EP US); C03C 2217/281 (2013.01 - EP US); C03C 2218/152 (2013.01 - EP US)
Citation (search report)
[X] US 2865791 A 19581223 - WILHELM RUPPERT, et al
Designated contracting state (EPC)
BE FR NL
DOCDB simple family (publication)
WO 8402128 A1 19840607; AU 2269883 A 19840618; AU 565957 B2 19871001; CA 1222912 A 19870616; CH 662808 A5 19871030; DE 3390341 C2 19921022; DE 3390341 T1 19850110; DK 162938 B 19911230; DK 162938 C 19920525; DK 353284 A 19840719; DK 353284 D0 19840719; EP 0128169 A1 19841219; EP 0128169 A4 19850827; EP 0128169 B1 19900711; ES 527422 A0 19841101; ES 8500874 A1 19841101; GB 2141444 A 19841219; GB 2141444 B 19860611; GB 8417560 D0 19840815; IT 1203683 B 19890215; IT 8368218 A0 19831121; MX 160808 A 19900525; SE 453491 B 19880208; SE 8403834 D0 19840723; SE 8403834 L 19840723; US 4524718 A 19850625; US 4535000 A 19850813; US 4585674 A 19860429
DOCDB simple family (application)
US 8301678 W 19831028; AU 2269883 A 19831028; CA 440868 A 19831109; CH 349984 A 19831028; DE 3390341 T 19831028; DK 353284 A 19840719; EP 83903848 A 19831028; ES 527422 A 19831121; GB 8417560 A 19831028; IT 6821883 A 19831121; MX 19941683 A 19831115; SE 8403834 A 19840723; US 52167583 A 19830810; US 54647183 A 19831028; US 70460985 A 19850225