EP 0143011 A1 19850529 - Intense soft X-ray source from a cylindrically compressed plasma created by explosion of a foil.
Title (en)
Intense soft X-ray source from a cylindrically compressed plasma created by explosion of a foil.
Title (de)
Intensive Quelle von weichen Röntgenstrahlen mit durch Explosion einer Folie erhaltenen zylindrisch-kompressierten Plasma.
Title (fr)
Source intense de rayons x mous, à compression cylindrique de plasma, ce plasma étant obtenu à partir d'une feuille explosée.
Publication
Application
Priority
FR 8314085 A 19830902
Abstract (en)
[origin: US4602376A] Intense soft X-ray source comprising a means for producing a cylindrical plasma jet between a cathode and an anode, connected to a pulsed high voltage generator, wherein the means for producing the plasma jet comprises a capacitor bank connected to a charging voltage source and also to a transmission line provided with a tripping means, the assembly having a very low inductance so as to permit a rapid discharge; a sheet of solid material connected by its periphery to one of the conductors of the line and by its central part to the other conductor, so that a radial discharge can be produced when the tripping means is conductive, a plasma jet resulting from the explosion of the sheet; a means for giving the said plasma jet a cylindrical shape.
Abstract (fr)
Pour produire le jet de plasma, on dispose une feuille mince (40) entre deux électrodes coaxiales (30, 34). La décharge de condensateurs à travers une ligne rapide (22) permet de faire exploser la feuille et de créer le plasma. Application à la production de rayons X mous.
IPC 1-7
IPC 8 full level
H01J 35/22 (2006.01); H05G 2/00 (2006.01); H05H 1/52 (2006.01)
CPC (source: EP US)
H05G 2/003 (2013.01 - EP US); H05H 1/52 (2013.01 - EP US)
Citation (search report)
- [Y] US 3835330 A 19740910 - BAKER W, et al
- [Y] JOURNAL OF APPLIED PHYSICS, vol. 49, no. 9, septembre 1978, pages 4694-4706, New York, USA; W.L. BAKER et al.: "Electromagnetic-implosion generation of pulsed high-energy-density plasma"
- [A] SOVIET PHYSICS-TECHNICAL PHYSICS, vol. 20, no. 5, mai 1975, pages 708-710, New York, USA; V.I. BAIKOV et al.: "Visible and near-UV emission in the electrical explosion of a thin metal foil"
- [AD] PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, "SPIE", vol. 316, 1981, pages 196-202, Bellingham, USA; R.A. GUTCHECK et al.: "Intense plasma source for x-ray microscopy"
- [AD] JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, vol. 19, no. 4, novembre/décembre 1981, pages 1190-1193, New York, USA; J.S. PEARLMAN et al.: "X-ray lithography using a pulsed plasma source"
Designated contracting state (EPC)
DE GB
DOCDB simple family (publication)
FR 2551614 A1 19850308; FR 2551614 B1 19860321; EP 0143011 A1 19850529; JP S6074335 A 19850426; US 4602376 A 19860722
DOCDB simple family (application)
FR 8314085 A 19830902; EP 84401732 A 19840829; JP 18254784 A 19840831; US 64345784 A 19840823