EP 0144524 A3 19861008 - GETTER PUMP FOR HIGH-VACUUM AND GAS DISCHARGE PLANTS
Title (en)
GETTER PUMP FOR HIGH-VACUUM AND GAS DISCHARGE PLANTS
Publication
Application
Priority
DE 3332608 A 19830909
Abstract (en)
[origin: EP0144524A2] The getter pump has gettering bodies (1) of non-evaporating gettering material fitted in a pump vessel (3) and associated heating elements (2). Said getter pump is intended to make it possible to produce a high vacuum in the pressure range of 10<-><3> mbar and below as a result of non-evaporating getters. For this purpose, the invention provides that the heating elements (2) are connected in parallel or a plurality of heating elements (2) are connected groupwise in series, the groups either being connected in parallel or brought out individually. The getter pump according to the invention can be used in high-vacuum and gas discharge plants. <IMAGE>
IPC 1-7
IPC 8 full level
F04B 37/02 (2006.01); H01J 7/18 (2006.01)
CPC (source: EP)
F04B 37/02 (2013.01); H01J 7/18 (2013.01)
Citation (search report)
- GB 1586676 A 19810325 - GETTERS SPA
- US 2988265 A 19610613 - GUNTER REICH
- FR 2327817 A1 19770513 - GETTERS SPA [IT]
Designated contracting state (EPC)
CH DE FR IT LI
DOCDB simple family (publication)
DE 3332608 A1 19850328; EP 0144524 A2 19850619; EP 0144524 A3 19861008
DOCDB simple family (application)
DE 3332608 A 19830909; EP 84109514 A 19840809