EP 0149089 A2 19850724 - Single electrode, multiple frequency plasma apparatus.
Title (en)
Single electrode, multiple frequency plasma apparatus.
Title (de)
Mehrfrequenz-Plasmagerät mit einer einzelnen Elektrode.
Title (fr)
Appareil à plasma multifréquence à électrode unique.
Publication
Application
Priority
US 56885984 A 19840106
Abstract (en)
Plasma processing is accomplished with an improved single electrode reactor apparatus. High and low frequency power supplies are coupled to the single electrode by way of a multi-stage passive filter network which performs the functions of coupling both power supplies to the electrode, iolating the low frequency power supply from the high frequency power supply, and attenuating the undesired frequencies produced by mixing of the two frequencies in the non-linear load presented by the reactor.
IPC 1-7
IPC 8 full level
H01L 21/205 (2006.01); H01J 37/32 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP)
H01J 37/32082 (2013.01); H01J 37/32165 (2013.01); H01J 37/32174 (2013.01)
Designated contracting state (EPC)
DE GB
DOCDB simple family (publication)
EP 0149089 A2 19850724; EP 0149089 A3 19860903; EP 0149089 B1 19891123; DE 3480573 D1 19891228; JP S60160620 A 19850822
DOCDB simple family (application)
EP 84114632 A 19841201; DE 3480573 T 19841201; JP 28187484 A 19841227