EP 0165140 B1 19880518 - SURFACE IONISATION-TYPE ION SOURCE, PARTICULARLY FOR THE REALISATION OF AN IONIC PROBE
Title (en)
SURFACE IONISATION-TYPE ION SOURCE, PARTICULARLY FOR THE REALISATION OF AN IONIC PROBE
Publication
Application
Priority
FR 8407606 A 19840516
Abstract (en)
[origin: US4801849A] An ion source is described, including a source of neutral particles which arrive at an ionization support positioned inside a chamber which is closed by a cap and which includes lateral walls. The cap includes an outlet orifice opposite which a plate defines a main ionization active surface. An electric field is applied between said device and by an electrode place downstream from the orifice in the direction of ion emission and fitted with a corresponding opening. Overall, the ionization support defines, by virtue of its active surface, and by virtue of holes surrounding said central active surface, a baffle assembly which prevents neutral atoms from passing directly to the outlet orifice, and which contributes to a high degree of ionization.
IPC 1-7
IPC 8 full level
H01J 37/08 (2006.01); H01J 27/24 (2006.01); H01J 27/26 (2006.01)
CPC (source: EP US)
H01J 27/26 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL SE
DOCDB simple family (publication)
EP 0165140 A1 19851218; EP 0165140 B1 19880518; DE 3562842 D1 19880623; FR 2564636 A1 19851122; FR 2564636 B1 19900706; JP H0451929 B2 19920820; JP S6151729 A 19860314; SU 1473724 A3 19890415; US 4801849 A 19890131
DOCDB simple family (application)
EP 85400969 A 19850515; DE 3562842 T 19850515; FR 8407606 A 19840516; JP 10492785 A 19850516; SU 3901400 A 19850515; US 11924187 A 19871106