EP 0167679 B1 19880330 - POLISHING APPARATUS
Title (en)
POLISHING APPARATUS
Publication
Application
Priority
EP 84201060 A 19840713
Abstract (en)
[origin: EP0167679A1] A polishing apparatus including a driving source (3), a polishing member (4) driven by the driving source (3), and a pair of guide members (23) and (30). The polishing member 4 is composed of a pair of rigid support plates (51) and (52) and an elastic body (50) sandwitched between the pair of rigid support plates (51) and (52). The lower-positioned support plate (52) is formed with a polishing face (5).
IPC 1-7
IPC 8 full level
B24B 23/02 (2006.01); B24D 9/08 (2006.01)
CPC (source: EP)
B24B 23/028 (2013.01); B24D 9/08 (2013.01)
Designated contracting state (EPC)
DE FR GB IT NL SE
DOCDB simple family (publication)
EP 0167679 A1 19860115; EP 0167679 B1 19880330; DE 3470124 D1 19880505
DOCDB simple family (application)
EP 84201060 A 19840713; DE 3470124 T 19840713