EP 0183230 B1 19890208 - METHOD AND APPARATUS FOR CONTROLLING THE CHEMICAL-THERMAL TREATMENT OF WORK PIECES IN A FLOW DISCHARGE
Title (en)
METHOD AND APPARATUS FOR CONTROLLING THE CHEMICAL-THERMAL TREATMENT OF WORK PIECES IN A FLOW DISCHARGE
Publication
Application
Priority
BG 6767284 A 19841126
Abstract (en)
[origin: US4648952A] The method and device for controlling the thermo chemical treatment of workpieces in slow discharge in a medium of treating gas, includes operating stages of warm-up with simultaneous intensive cathode sputtering, diffusion saturation, and cooling of treated workpieces. During each stage the workpiece temperature, the frequency of occurring arc discharges and the glow discharge voltage are measured and compared with preset values. Corresponding error signals and control signals are obtained and used to regulate the treated workpiece temperature and the arc discharge frequency using the discharge current value, and the glow discharge voltage using the flow rate value of one of at least two treating gases that enter the working chamber, a preset value of glow discharge voltage corresponding to each treating gas.
IPC 1-7
IPC 8 full level
C23C 8/36 (2006.01); C23C 14/54 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP US)
C23C 8/36 (2013.01 - EP US); H01J 37/32935 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB LI SE
DOCDB simple family (publication)
US 4648952 A 19870310; BG 41744 A1 19870814; DD 284132 A7 19901107; DE 3568193 D1 19890316; EP 0183230 A2 19860604; EP 0183230 A3 19870204; EP 0183230 B1 19890208; HU 198969 B 19891228; HU T39211 A 19860828; IN 166299 B 19900407; JP S61210173 A 19860918
DOCDB simple family (application)
US 80221185 A 19851126; BG 6767284 A 19841126; DD 28310085 A 19851122; DE 3568193 T 19851126; EP 85114999 A 19851126; HU 449285 A 19851125; IN 967MA1985 A 19851129; JP 26392185 A 19851126