EP 0184810 B1 19940629 - Method of detecting a focus defect of an electron microscope image.
Title (en)
Method of detecting a focus defect of an electron microscope image.
Title (de)
Verfahren zur Feststellung eines Fokussierungsfehlers eines elektronen-mikroskopischen Bildes.
Title (fr)
Méthode de détection d'un défaut de focalisation de l'image dans un microscope électronique.
Publication
Application
Priority
- JP 7807985 A 19850412
- JP 26051784 A 19841210
Abstract (en)
[origin: EP0184810A2] A two-dimensional image sensor is exposed under vacuum to an electron beam having passed through a specimen in an electron microscope to enable the image sensor to store the energy of the electron beam. Then, stimulating energy is applied to the image sensor to discharge the stored energy as light. The light discharged from the image sensor is photoelectrically detected to produce an image- signal. A defocus value of the image is detected on the basis of the image signal. The image signal is also subject electrically to the Fourier transform to produce a converted image signal indicative of a ring pattern. The degree of one ring, the length of minor and major axes of the ring, and the angle of inclination of the major axis are computed from the converted image signal for computing currents to be fed to a-stigmeter of the electron microscope to eliminate astigmatism.
IPC 1-7
IPC 8 full level
G01Q 30/02 (2010.01); G01Q 30/16 (2010.01); H01J 37/153 (2006.01); H01J 37/22 (2006.01); H01J 37/26 (2006.01)
CPC (source: EP US)
H01J 37/153 (2013.01 - EP US); H01J 37/224 (2013.01 - EP US); H01J 37/265 (2013.01 - EP US)
Citation (examination)
- Proceedings of the XIth International Congress of Electron Microscopy, Kyoto, 1986, pages 439 and 440, T. Oikawa et al. "Application of "imaging plate" for recording transmission electron microscope image"
- Radiology 148 (1983), pages 833 to 838, M. Sonoda et al., "Computed radiography utilizing scanning laser stimulated luminescence"
- Journal of Electron Microscopy, Vol. 33, No. 3 (1984), pages 255 to 257, Ishihara et al., "Usefulness of a scanning laser stimulated luminescence (SLSL) system for electron microscopy - a new image recording system"
Designated contracting state (EPC)
DE FR NL
DOCDB simple family (publication)
EP 0184810 A2 19860618; EP 0184810 A3 19870624; EP 0184810 B1 19940629; DE 3587871 D1 19940804; DE 3587871 T2 19941013; US 4695725 A 19870922
DOCDB simple family (application)
EP 85115653 A 19851209; DE 3587871 T 19851209; US 80646685 A 19851209