EP 0197214 A2 19861015 - Carrier assembly for two-sided polishing operation.
Title (en)
Carrier assembly for two-sided polishing operation.
Title (de)
Trägeranordnung für doppelseitigen Poliervorgang.
Title (fr)
Montage de support pour opération de polissage double-face.
Publication
Application
Priority
US 72064485 A 19850408
Abstract (en)
The present invention relates to a carrier assembly (10; 110) comprising a drive ring (12; 112; 212) made of a hard material in which at least one aperture (16; 116) is formed for retaining a preferably removeable workpiece holder (18, 20, 22, 24, 26; 118; 218) made of softer material than the material used to make the drive ring. The workpiece holder contains a cavity which holds and retains the workpiece (28, 30, 32, 34, 36; 128, 130; 228, 230). The softer material of the workpiece holder protects and cushions the workpiece while the drive ring made of hard material withstands the forces generated during polishing, lapping and grinding operations.
IPC 1-7
IPC 8 full level
B24B 7/17 (2006.01); B24B 37/28 (2012.01)
CPC (source: EP KR)
B24B 29/00 (2013.01 - KR); B24B 37/28 (2013.01 - EP)
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI LU NL SE
DOCDB simple family (publication)
EP 0197214 A2 19861015; CN 85105523 A 19860702; JP S61230852 A 19861015; KR 860008003 A 19861110
DOCDB simple family (application)
EP 85304348 A 19850618; CN 85105523 A 19850710; JP 17128085 A 19850805; KR 850003972 A 19850607