EP 0198907 A1 19861029 - FOCUSED SUBSTRATE ALTERATION.
Title (en)
FOCUSED SUBSTRATE ALTERATION.
Title (de)
FOKUSSIERTE ALTERNIERUNG EINES SUBSTRATS.
Title (fr)
ALTERATION FOCALISEE D'UN SUBSTRAT.
Publication
Application
Priority
- US 66525184 A 19841026
- US 76937085 A 19850826
Abstract (en)
[origin: WO8602774A1] Alteration of a precisely located site on a substrate (35) using apparatus that comprises: a) a focusable ion source (10); b) a lens (22) positioned to focus ions emitted by the source into an ion beam (124); c) a vacuum chamber (30) for containing the substrate site in the path of the ion beam; and d) a directed gas inlet (55) positioned to provide a localized supply of a substance at the site whereby the beam interacts with the substances to cause the alteration localized at the site. Methods of performing the alteration are also disclosed.
Abstract (fr)
On altère avec exactitude un site précisément localisé sur un substrat (35) en balayant le site avec un faisceau focalisé d'ions (24) en présence d'un gaz (hydrocarbure ou hydrogène) au niveau du site pour former un dépôt opaque sur celui-ci.
IPC 1-7
IPC 8 full level
G03F 1/00 (2012.01); H01J 37/317 (2006.01)
CPC (source: EP)
G03F 1/74 (2013.01); H01J 37/3178 (2013.01)
Citation (search report)
See references of WO 8602581A1
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI LU NL SE
DOCDB simple family (publication)
WO 8602774 A1 19860509; EP 0198907 A1 19861029; EP 0198908 A1 19861029; EP 0198908 A4 19870302; WO 8602581 A1 19860509
DOCDB simple family (application)
US 8502109 W 19851025; EP 85905574 A 19851025; EP 85905575 A 19851025; US 8502108 W 19851025