EP 0199625 B1 19890322 - ELECTRON CYCLOTRON RESONANCE NEGATIVE ION SOURCE
Title (en)
ELECTRON CYCLOTRON RESONANCE NEGATIVE ION SOURCE
Publication
Application
Priority
FR 8505461 A 19850411
Abstract (en)
[origin: US4757237A] An electron cyclotron resonance negative ion source comprises an enclosure containing a gas or vapor of a material for forming a plasma, means for injecting into the enclosure a high frequency electromagnetic field forming electrons by ionizing the gas or vapor, means for producing within the enclosure an axially symmetric magnetic field whose amplitude increases along the axis of symmetry, whereby said amplitude, which is at a maximum in the vicinity of and upstream of the negative ion extraction zone, having in the central region of the enclosure a value for which the electron cyclotron resonance condition is satisfied, as well as means for extracting the negative ions formed, brought to a positive potential compared with the enclosure.
IPC 1-7
IPC 8 full level
G21K 1/14 (2006.01); H01J 27/02 (2006.01); H01J 27/18 (2006.01); H05H 7/08 (2006.01)
CPC (source: EP US)
G21K 1/14 (2013.01 - EP US); H01J 27/028 (2013.01 - EP US); H01J 27/18 (2013.01 - EP US)
Designated contracting state (EPC)
BE DE GB IT NL
DOCDB simple family (publication)
EP 0199625 A1 19861029; EP 0199625 B1 19890322; DE 3662576 D1 19890427; FR 2580427 A1 19861017; FR 2580427 B1 19870515; JP S61239546 A 19861024; US 4757237 A 19880712
DOCDB simple family (application)
EP 86400726 A 19860404; DE 3662576 T 19860404; FR 8505461 A 19850411; JP 8403686 A 19860411; US 84948986 A 19860408