Global Patent Index - EP 0205819 B1

EP 0205819 B1 19901031 - SYSTEM FOR THE STAINLESS DRYING OF OBJECTS WITH SURFACES WETTED BY A LIQUID

Title (en)

SYSTEM FOR THE STAINLESS DRYING OF OBJECTS WITH SURFACES WETTED BY A LIQUID

Publication

EP 0205819 B1 19901031 (DE)

Application

EP 86105655 A 19860424

Priority

US 74957685 A 19850627

Abstract (en)

[origin: EP0205819A1] 1. Method for drying stainlessly of objects having flat surfaces and purified in a treatment liquid having predetermined degree of purity, said objects are immersed in substantially the same alignment in the treatment liquid, to achieve a homogeneous wetting of the surfaces of the objects, whereby the following steps are performed for drying : a) a protective atmosphere with a gaseous treatment medium having predetermined degree of purity is established above the treatment liquid, b) the treatment liquid is separated from the object after wetting, whereby a quick movement of separation results by lowering of the liquid, respectively of the bath, such that the released space around the objects is filled with gaseous treatment medium without time loss in order to avoid a contact with other gaseous mediums, c) together with or immediately after the separation of treatment liquid and objects gaseous treatment medium is directed substantially coplanar to the surface of body of the objects and downwards to each object in order to blow off adherent liquid.

IPC 1-7

B05D 3/04; B08B 5/00; F26B 5/00; H01L 21/30

IPC 8 full level

B05D 3/04 (2006.01); B08B 5/02 (2006.01); F26B 5/00 (2006.01); F26B 9/00 (2006.01); F26B 21/00 (2006.01)

CPC (source: EP)

B05D 3/04 (2013.01); B08B 5/02 (2013.01); F26B 5/005 (2013.01); F26B 9/00 (2013.01); F26B 21/004 (2013.01)

Designated contracting state (EPC)

CH DE FR GB IT LI NL SE

DOCDB simple family (publication)

EP 0205819 A1 19861230; EP 0205819 B1 19901031; DE 3675267 D1 19901206

DOCDB simple family (application)

EP 86105655 A 19860424; DE 3675267 T 19860424