EP 0209746 A1 19870128 - Method and apparatus for measuring temperature of substrate.
Title (en)
Method and apparatus for measuring temperature of substrate.
Title (de)
Einrichtung und Verfahren zur Messung der Temperatur eines Substrats.
Title (fr)
Dispositif et méthode pour mesurer la température d'un substrat.
Publication
Application
Priority
- JP 3767786 A 19860221
- JP 13597185 A 19850624
Abstract (en)
A method for measuring the temperature of a substrate comprises forming a drop of molten metal on the surface of a substrate on which a thin film is formed or the surface of a substrate holder and dipping the top of a thermocouple into the drop of the molten metal. An apparatus for measuring the temperature of a substrate is equipped with a spring having contraction and expansion properties at the rear end of a thermocouple.
IPC 1-7
IPC 8 full level
G01K 1/14 (2006.01)
CPC (source: EP)
G01K 1/146 (2013.01)
Citation (search report)
- [A] US 3930159 A 19751230 - MARQUET FREDDY ANTOINE
- [XP] FR 2562662 A1 19851011 - VALEO [FR]
- [AP] US 4558959 A 19851217 - THOMAS DEAN G [US], et al
- [A] FR 1216700 A 19600427 - ATOMIC ENERGY AUTHORITY UK
- [A] IBM TECHNICAL DISCLOSURE BULLETIN, vol. 25, no. 11B, April 1983, pages 6105,6106; J.F. CAIN et al.: "In-situ specimen temperature monitor for UHV chamber"
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 0209746 A1 19870128; EP 0209746 B1 19900404; AU 5916186 A 19870108; AU 595210 B2 19900329; DE 3670156 D1 19900510
DOCDB simple family (application)
EP 86108604 A 19860624; AU 5916186 A 19860624; DE 3670156 T 19860624