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Current content: 157 117 910 patent documents

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139 301 new documents added

1 340 825 documents amended

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EP 0214277 B1 19900613 - CRYOPUMP REGENERATION METHOD AND APPARATUS

Title (en)

CRYOPUMP REGENERATION METHOD AND APPARATUS

Publication

EP 0214277 B1 19900613 (EN)

Application

EP 86902122 A 19860303

Priority

US 70746785 A 19850301

Abstract (en)

[origin: WO8605240A1] A cryopump is regenerated by means of an ejector pump (70) which draws gas from the cryopump as the pump is warmed. The ejector (70) is actuated by an inert gas. The same inert gas may also be used to purge the pump during evacuation.

IPC 1-7

F04B 37/08

IPC 8 full level

F04B 37/08 (2006.01)

CPC (source: EP)

F04B 37/085 (2013.01)

Designated contracting state (EPC)

CH DE FR GB IT LI NL

DOCDB simple family (publication)

WO 8605240 A1 19860912; DE 3671940 D1 19900719; EP 0214277 A1 19870318; EP 0214277 B1 19900613; JP S62502276 A 19870903

DOCDB simple family (application)

US 8600462 W 19860303; DE 3671940 T 19860303; EP 86902122 A 19860303; JP 50165186 A 19860303