EP 0222777 B1 19890712 - UNIT INTENDED TO RESTORE THE INITIAL CLEANNESS CONDITIONS IN A QUARTZ TUBE USED AS REACTION CHAMBER FOR FABRICATING INTEGRATED CIRCUITS
Title (en)
UNIT INTENDED TO RESTORE THE INITIAL CLEANNESS CONDITIONS IN A QUARTZ TUBE USED AS REACTION CHAMBER FOR FABRICATING INTEGRATED CIRCUITS
Publication
Application
Priority
FR 8503433 A 19850308
Abstract (en)
[origin: WO8605129A1] The unit comprises a vertical panel (1) separating the workshop into a medium cleanness area (2) and a maximum cleanness area (3), an elongated container (4) in the area (2) and a housing (6) inserted in an opening (5) of the panel (1); the tubes are cleaned and pre-rinsed in the container (4), and than rinsed and dried in the housing (6) which is also used as lock-chamber for transferring the tubes between the areas (2) and (3). Application to the making of integrated circuits.
IPC 1-7
IPC 8 full level
B08B 3/10 (2006.01); B08B 15/00 (2006.01); C03B 20/00 (2006.01); F24F 3/16 (2006.01); F24F 7/06 (2006.01); H01L 21/22 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP US)
B08B 15/00 (2013.01 - EP US); F24F 3/163 (2021.01 - EP US)
Designated contracting state (EPC)
DE GB IT NL
DOCDB simple family (publication)
WO 8605129 A1 19860912; DE 3664264 D1 19890817; EP 0222777 A1 19870527; EP 0222777 B1 19890712; FR 2578455 A1 19860912; FR 2578455 B1 19870507; JP S62502107 A 19870820; US 4756322 A 19880712
DOCDB simple family (application)
FR 8600069 W 19860304; DE 3664264 T 19860304; EP 86901424 A 19860304; FR 8503433 A 19850308; JP 50145286 A 19860304; US 93026786 A 19861030