EP 0222877 A4 19890321 - IN-lINE DISK SPUTTERING SYSTEM.
Title (en)
IN-lINE DISK SPUTTERING SYSTEM.
Title (de)
ANLAGE ZUM AUFSPRITZEN VON SCHEIBEN IN REIHE.
Title (fr)
SYSTEME DE TRAITEMENT EN LIGNE DE DISQUES PAR PULVERISATION.
Publication
Application
Priority
US 73287885 A 19850509
Abstract (en)
[origin: WO8606753A1] A step-dwell transport apparatus (10) and method for use in an in-line controlled environment processing system. The transport apparatus (10) employs a plurality of shuttles (20) arranged in seris along two parallel rails (18, 40). Each shuttle (20) carries one or more planar objects (30) through a process chamber (12), which contains several in-line processing stations (32). One of the rails (40) guides a queue of abutting shuttles (20) through the process chamber (12), while the other rail (18) serves as a return path for another queue of abutting shuttles (20). The shuttles (20) move along each rail (18, 40), with locomotion along the rail being provided by a pneumatic cylinder (64, 74) and linkage that periodically pushes forward the trailing shuttle (20) in the queue. Transfer mechanisms (22, 24) are provided at each end of the apparatus to transfer individual shuttles (20) from the end of one rail to the beginning of the other rail. Shuttles (20) are supplied to and withdrawn from the process chamber (12) one at a time through in-line air locks (60, 68).
IPC 1-7
IPC 8 full level
C23C 14/34 (2006.01); C23C 14/56 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR)
C23C 14/34 (2013.01 - KR); C23C 14/568 (2013.01 - EP); H01L 21/67712 (2013.01 - EP); H01L 21/6776 (2013.01 - EP)
Citation (search report)
- No more relevant documents has been found.
- See references of WO 8606753A1
Designated contracting state (EPC)
BE DE FR GB IT LU NL SE
DOCDB simple family (publication)
WO 8606753 A1 19861120; CA 1261779 A 19890926; EP 0222877 A1 19870527; EP 0222877 A4 19890321; JP S62502846 A 19871112; KR 880700100 A 19880215; KR 900008252 B1 19901106
DOCDB simple family (application)
US 8601010 W 19860508; CA 508784 A 19860509; EP 86903783 A 19860508; JP 50285786 A 19860508; KR 870700011 A 19870108