EP 0247153 A4 19880519 - THERMALLY STABILIZED PHOTORESIST IMAGES.
Title (en)
THERMALLY STABILIZED PHOTORESIST IMAGES.
Title (de)
THERMISCH STABILISIERTE, LICHTWIDERSTANDSFÄHIGE BILDER.
Title (fr)
IMAGES SUR PHOTORESERVE A STABILISATION THERMIQUE.
Publication
Application
Priority
- US 80251485 A 19851127
- US 82394286 A 19860129
- US 87938586 A 19860627
Abstract (en)
[origin: WO8703387A1] Photoresist image layers, particularly those used for high resolution geometries in microelectronic applications, are stabilized against distortion or degradation by the heat generated during subsequent etching, ion implantation processes and the like, by the application of a film of a thermally stabilizing agent prior to postdevelopment bake of the image layer. The process serves to achieve thermal stabilization of the photoresist image layer without significantly affecting the ease of subsequent stripping of the layer. It is particularly effective when used to thermally stabilize positive resist images derived from photoresist systems based on novolak resins.
IPC 1-7
IPC 8 full level
G03F 7/40 (2006.01)
CPC (source: EP)
G03F 7/40 (2013.01)
Citation (search report)
- [X] GB 1575200 A 19800917 - VICKERS LTD
- [A] EP 0127477 A2 19841205 - VICKERS PLC [GB]
- [A] EP 0155620 A2 19850925 - HOECHST AG [DE]
- [A] FR 2277682 A1 19760206 - VICKERS LTD [GB]
- [A] GB 2099371 A 19821208 - POLYCHROME CORP
- [A] US 3244569 A 19660405 - FAUSER DONALD L, et al
- [A] EP 0095209 A2 19831130 - PHILIPS ELECTRONIC ASSOCIATED [GB], et al
- See references of WO 8703387A1
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI LU NL SE
DOCDB simple family (publication)
WO 8703387 A1 19870604; AU 6629286 A 19870701; CA 1279155 C 19910122; EP 0247153 A1 19871202; EP 0247153 A4 19880519
DOCDB simple family (application)
US 8602441 W 19861112; AU 6629286 A 19861112; CA 523167 A 19861117; EP 86907168 A 19861112