EP 0272362 A3 19900502 - METHOD AND APPARATUS FOR LAPPING OR POLISHING OPTICAL SURFACES
Title (en)
METHOD AND APPARATUS FOR LAPPING OR POLISHING OPTICAL SURFACES
Publication
Application
Priority
DE 3643914 A 19861222
Abstract (en)
[origin: US4802309A] The workpiece which is moved relative to the tool is processed by a tool configured in the form of a strip-shaped flexible membrane. On the rearward side of the membrane, loading units are arranged with the force of each unit being individually controlled. The pressure distribution exerted by the loading units on the workpiece is varied with time in dependence upon the position of the workpiece. With the method, large optical components such as telescope mirrors and grazing-incidence optical elements for x-ray telescopes can be polished more quickly than by the heretofore known methods. Also non-rotationally symmetrical defects of the surface can be eliminated. An apparatus for carrying out the method of the invention is also disclosed.
IPC 1-7
IPC 8 full level
B24B 13/06 (2006.01); B24B 13/015 (2006.01); B24B 21/16 (2006.01); B24B 37/00 (2006.01); B24B 39/00 (2006.01)
CPC (source: EP US)
B24B 13/015 (2013.01 - EP US); B24B 21/16 (2013.01 - EP US)
Citation (search report)
- [AD] GB 2163076 A 19860219 - ZEISS STIFTUNG
- [A] DE 3509004 A1 19860925 - WEBER GEORG
- [A] FR 2448417 A1 19800905 - INST KOSM I [SU]
- [A] US 3589078 A 19710629 - BALA JOHN L, et al
Designated contracting state (EPC)
DE FR NL
DOCDB simple family (publication)
EP 0272362 A2 19880629; EP 0272362 A3 19900502; DE 3643914 A1 19880630; JP S63162150 A 19880705; US 4802309 A 19890207; US 4850152 A 19890725
DOCDB simple family (application)
EP 87102822 A 19870227; DE 3643914 A 19861222; JP 8396387 A 19870407; US 14745488 A 19880125; US 8229287 A 19870806