EP 0276731 B1 19930310 - METHOD FOR ELECTRON BEAM GUIDANCE WITH ENERGY SELECTION, AND ELECTRON SPECTROMETER
Title (en)
METHOD FOR ELECTRON BEAM GUIDANCE WITH ENERGY SELECTION, AND ELECTRON SPECTROMETER
Publication
Application
Priority
DE 3702696 A 19870130
Abstract (en)
[origin: US4845361A] High energy resolution at high electron current at the specimen or at the detector is obtained by an electron beam guiding with focusing energy selection, in particular in an electron spectrometer with emission system and at least one energy dispersive system with different focusing in two mutually perpendicular directions, by a non-circular-symmetrical lens system placed after or before the energy dispersive system and correcting the different focusing of the electrons in the two mutually perpendicular directions such that either the virtual or the real entry stop of the energy dispersive system is imaged on an accessible image plane outside the energy dispersive system or an object outside the energy dispersive system is imaged on the virtual or real exit stop of the latter.
IPC 1-7
IPC 8 full level
G01N 23/225 (2006.01); H01J 37/05 (2006.01); H01J 49/06 (2006.01); H01J 49/44 (2006.01)
CPC (source: EP US)
H01J 49/06 (2013.01 - EP US); H01J 49/44 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
EP 0276731 A2 19880803; EP 0276731 A3 19900124; EP 0276731 B1 19930310; DE 3702696 A1 19880811; DE 3878939 D1 19930415; JP 2529712 B2 19960904; JP S63276861 A 19881115; US 4845361 A 19890704
DOCDB simple family (application)
EP 88100724 A 19880120; DE 3702696 A 19870130; DE 3878939 T 19880120; JP 1481288 A 19880127; US 14959688 A 19880128