EP 0279500 B2 19981104 - Highly pure nitrogen gas producing apparatus
Title (en)
Highly pure nitrogen gas producing apparatus
Title (de)
Sehr reiner Stickstoffgaserzeugungsapparat
Title (fr)
Dispositif de production de gaz d'azote à haute pureté
Publication
Application
Priority
- EP 84901096 A 19840307
- JP 412384 A 19840111
- JP 3805083 A 19830308
Abstract (en)
[origin: EP0279500A2] A producing apparatus of highly pure nitrogen gas which is used in electronic industry for manufacturing silicon semi-conductors. By the apparatus of this invention, the liquefied nitrogen storage means (23) is connected to rectifying column (15) through the inlet channel (24), the ultra low temperature compressed air supplied into the rectifying column (15) through the air compression means (9), water and carbon dioxide removing means (12) and heat exchangers (13) (14) is cooled further by the evaporating heat of the liquefied nitrogen, the nitrogen is taken out in gas form by utilizing the difference in boiling point, the oxygen is left as liquid. The obtained nitrogen gas is combined with the gassified liquid nitrogen from the liquefied nitrogen storage means (23) and made into product nitrogen gas.
IPC 1-7
IPC 8 full level
F25J 3/04 (2006.01)
CPC (source: EP)
F25J 3/04254 (2013.01); F25J 3/044 (2013.01); F25J 3/04824 (2013.01); F25J 2200/74 (2013.01); F25J 2205/60 (2013.01); F25J 2210/42 (2013.01); F25J 2215/44 (2013.01); F25J 2290/62 (2013.01)
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 0279500 A2 19880824; EP 0279500 A3 19881026; EP 0279500 B1 19921223; EP 0279500 B2 19981104
DOCDB simple family (application)
EP 88200470 A 19840307