EP 0288533 A4 19890206 - IMAGE REVERSAL SYSTEM AND PROCESS.
Title (en)
IMAGE REVERSAL SYSTEM AND PROCESS.
Title (de)
BILDUMKEHRSYSTEM UND -VERFAHREN.
Title (fr)
PROCEDE ET SYSTEME D'INVERSION D'IMAGE.
Publication
Application
Priority
- US 6773287 A 19870626
- US 92105686 A 19861020
Abstract (en)
[origin: WO8802878A1] A light-sensitive composition and method which can be used to produce photoresist images. The composition comprises a mixture of a novolak resin, a 1,2-quinonediazide sensitizer and sufficient quantities of one or more organic stabilizing compounds to render the total composition soluble in alkaline developer. In producing a negative image the composition is exposed imagewise to actinic radiation, thereafter heated to render the exposed image insoluble to alkaline developer, and the unexposed composition is then removed using alkaline developer without the necessity to subject the unexposed composition to exposure to actinic radiation prior to the development stage.
IPC 1-7
IPC 8 full level
G03F 7/38 (2006.01); G03C 1/72 (2006.01); G03F 7/004 (2006.01); G03F 7/022 (2006.01)
CPC (source: EP)
G03F 7/0226 (2013.01)
Citation (search report)
- [X] PATENT ABSTRACTS OF JAPAN, vol. 10, no. 338 (P-516)[2394], 15th November 1986; & JP-A-61 141 441 (TOKYO OHKA KOGYO CO. LTD) 28-06-1986
- See references of WO 8802878A1
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI LU NL SE
DOCDB simple family (publication)
WO 8802878 A1 19880421; AU 8173487 A 19880506; EP 0288533 A1 19881102; EP 0288533 A4 19890206; JP H01501176 A 19890420
DOCDB simple family (application)
US 8702743 W 19871016; AU 8173487 A 19871016; EP 87907391 A 19871016; JP 50691987 A 19871016