EP 0295743 B1 19920506 - ION SOURCE WITH FOUR ELECTRODES
Title (en)
ION SOURCE WITH FOUR ELECTRODES
Publication
Application
Priority
FR 8708196 A 19870612
Abstract (en)
[origin: EP0295743A1] Vacuum arc ion-source comprising an anode (2 or 3) and a cathode (1) which are arranged facing one another, and are brought to different potentials, and in which the plasma (7) is emitted perpendicularly to the surface of the cathode. This plasma is projected by means of two suitably polarised free-standing gates (4 and 5). <??>Application to the implanting of metal ions. <IMAGE> <IMAGE>
IPC 1-7
IPC 8 full level
H01J 27/02 (2006.01); H01J 27/08 (2006.01); H01J 37/08 (2006.01)
CPC (source: EP US)
H01J 27/022 (2013.01 - EP US); H01J 27/08 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB LI NL
DOCDB simple family (publication)
EP 0295743 A1 19881221; EP 0295743 B1 19920506; DE 3870720 D1 19920611; FR 2616587 A1 19881216; FR 2616587 B1 19891124; JP S643941 A 19890109; US 4939425 A 19900703
DOCDB simple family (application)
EP 88201173 A 19880608; DE 3870720 T 19880608; FR 8708196 A 19870612; JP 14064888 A 19880609; US 20512488 A 19880610