EP 0300932 B1 19920129 - ELECTRON SOURCE
Title (en)
ELECTRON SOURCE
Publication
Application
Priority
FR 8710642 A 19870722
Abstract (en)
[origin: JPH01126598A] PURPOSE: To operate an entire part under a single pressure and to eliminate the need for a complex exhaust system by constituting a potential cavity by forming for example, an opening at the side of an anode for a cathode and adding a magnetic field that is in parallel with the direction of the anode- cathode to the opening. CONSTITUTION: An electron source consists of a cathode K and an anode A and the cathode K has an opening 11 at a side toward the anode A, thus constituting a potential cavity 10. For example, a means made of, for example, a permanent magnet is provided to apply a magnetic field B in parallel with a direction for connecting the cathode K and the anode A at the opening 11. When an electric field is applied between the anode A and the cathode K, an electric force line is flexed inward at the opening 11 due to the operation of the cavity 10. Then, a region where an electric field is at right angle to the direction for connecting the anode A and the cathode K, namely at right angle to the magnetic field B being applied is formed along with the curving of the electric force line, thus forming plasma even at a lower gas than a case without this sort of electromagnetic field. A plasma region 13 is formed near the opening 11 and the pressure at that time may exceed 1/several tens pascal.
IPC 1-7
IPC 8 full level
CPC (source: EP US)
H01J 3/025 (2013.01 - EP US)
Designated contracting state (EPC)
DE GB
DOCDB simple family (publication)
EP 0300932 A1 19890125; EP 0300932 B1 19920129; DE 3868169 D1 19920312; FR 2618602 A1 19890127; FR 2618602 B1 19900105; JP H01126598 A 19890518; US 4886992 A 19891212
DOCDB simple family (application)
EP 88420256 A 19880720; DE 3868169 T 19880720; FR 8710642 A 19870722; JP 18274288 A 19880721; US 22168188 A 19880720