EP 0308537 B1 19910828 - SENSOR FOR CONVERTING A DISTANCE TO OPTICAL AND FURTHER TO ELECTRICAL ENERGY, AND SURFACE SCANNING APPARATUS USING SAME
Title (en)
SENSOR FOR CONVERTING A DISTANCE TO OPTICAL AND FURTHER TO ELECTRICAL ENERGY, AND SURFACE SCANNING APPARATUS USING SAME
Publication
Application
Priority
EP 87114008 A 19870925
Abstract (en)
[origin: EP0308537A1] A sensor body (1) is formed as a light waveguide for laser light (2). A light exit site (10) for light diffracted within the sensor body (1) is located at a surface (6) thereof which faces away from a measured body (M). A detection particle (15) is located at the surface (5) of the sensor body (1) facing the measured body (M). It has a substantially convex and rounded off form and a major dimension which is smaller than the wavelength of the light (2). The measured body (M) is located in the optical near field of the detection particle (15). The latter has a major dimension of 5 to 500 nm and preferably of 20 to 100 nm. A detector means (11) converts the optical energy of the diffracted light to an electrical detector signal. A continuous thin film (16) is provided as a coating for the sensor (S). It substantially covers the detection particle (15) and at least part of the surface (5) of the sensor body (1) in the vicinity of the detection particle (15) It has a thickness which is smaller than one half of said predetermined wavelength. Preferably it is formed of gold and has a thickness of less than 100 nm. The sensor is used to finally convert a distance to an electrical quantity.
IPC 1-7
IPC 8 full level
G01B 11/00 (2006.01); G01B 11/30 (2006.01); G01Q 10/00 (2010.01); G01Q 20/02 (2010.01); G01Q 60/18 (2010.01); G01Q 60/22 (2010.01); G11B 5/60 (2006.01); G11B 11/00 (2006.01); G11B 11/105 (2006.01); G11B 21/20 (2006.01); G12B 21/06 (2006.01); G11B 9/00 (2006.01)
CPC (source: EP US)
G01B 11/306 (2013.01 - EP US); G01Q 20/02 (2013.01 - EP US); G01Q 60/22 (2013.01 - EP US); G11B 5/6005 (2013.01 - EP US); G11B 11/00 (2013.01 - EP US); G11B 11/10532 (2013.01 - EP US); G11B 21/20 (2013.01 - EP US); G11B 9/1409 (2013.01 - EP US)
Citation (examination)
A New Dictionary of Physics: H.J.Gray & A.Isaacs, p.13
Designated contracting state (EPC)
AT CH DE ES FR GB IT LI NL SE
DOCDB simple family (publication)
EP 0308537 A1 19890329; EP 0308537 B1 19910828; AT E66737 T1 19910915; DE 3772573 D1 19911002; ES 2024468 B3 19920301; JP 2717279 B2 19980218; JP H01102302 A 19890420; US 5025147 A 19910618
DOCDB simple family (application)
EP 87114008 A 19870925; AT 87114008 T 19870925; DE 3772573 T 19870925; ES 87114008 T 19870925; JP 22765088 A 19880913; US 24770688 A 19880922