EP 0314763 B1 19930303 - SECONDARY ELECTRON DETECTOR FOR USE IN A GASEOUS ATMOSPHERE
Title (en)
SECONDARY ELECTRON DETECTOR FOR USE IN A GASEOUS ATMOSPHERE
Publication
Application
Priority
US 5270087 A 19870521
Abstract (en)
[origin: WO8809564A1] The invention provides for a device and method for generating, amplifying, and detecting secondary electrons from a surface of a sample. The device contains a vacuum envelope (1) having a pressure limiting aperture (2), a charged particle beam source (3), means (4, 5) for focusing and directing the charged particle beam through the aperture (2) to a sample mounted on a sample platform (6) located in a gaseous environment outside of the vacuum envelope (1), an electrode (7) located outside of the vacuum envelope (1) and close to the sample platform (6). In operation, the electrode is biased by a voltage source (8) to accelerate secondary electrons emitted by the sample so that they collide with gas molecules to produce negative charge carriers which multiply by further collisions. The negative charge carriers are collected by the electrode (7) to produce a current which is amplified by a current amplifier (4) and output to a detector (10).
IPC 1-7
IPC 8 full level
H01J 37/28 (2006.01); H01J 37/06 (2006.01); H01J 37/244 (2006.01); H01J 37/252 (2006.01)
CPC (source: EP KR US)
H01J 37/244 (2013.01 - EP US); H01J 37/28 (2013.01 - KR); H01J 2237/2448 (2013.01 - EP US); H01J 2237/2449 (2013.01 - EP US); H01J 2237/24507 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI LU NL SE
DOCDB simple family (publication)
US 4785182 A 19881115; AT E86409 T1 19930315; AU 1790088 A 19881221; AU 603226 B2 19901108; CA 1293337 C 19911217; CN 1012402 B 19910417; CN 1031154 A 19890215; DE 3878828 D1 19930408; DE 3878828 T2 19930609; EP 0314763 A1 19890510; EP 0314763 A4 19891213; EP 0314763 B1 19930303; ES 2007856 A6 19890701; IL 86430 A0 19881115; IL 86430 A 19920216; JP H01502225 A 19890803; JP H0532860 B2 19930518; KR 890702234 A 19891223; KR 970005031 B1 19970411; MX 174400 B 19940513; RU 2020643 C1 19940930; WO 8809564 A1 19881201; ZA 883273 B 19881111
DOCDB simple family (application)
US 5270087 A 19870521; AT 88904896 T 19880517; AU 1790088 A 19880517; CA 567347 A 19880520; CN 88103140 A 19880521; DE 3878828 T 19880517; EP 88904896 A 19880517; ES 8801554 A 19880518; IL 8643088 A 19880518; JP 50460988 A 19880517; KR 890700124 A 19890123; MX 1158388 A 19880520; SU 4613422 A 19890120; US 8801654 W 19880517; ZA 883273 A 19880509