EP 0327311 B1 19940914 - A coating fluid for forming an oxide coating.
Title (en)
A coating fluid for forming an oxide coating.
Title (de)
Beschichtungsflüssigkeit zur Herstellung einer Oxidschicht.
Title (fr)
Fluide de revêtement pour la formation d'une couche d'oxyde.
Publication
Application
Priority
JP 2237088 A 19880202
Abstract (en)
[origin: EP0327311A2] A coating fluid for forming an oxide coating, having a good thermal stability and superior coating-forming properties is provided, which fluid comprises a reaction product obtained by subjecting (A) an alkoxysilane or aryloxysilane expressed by the formula RmSi(OR)4-m wherein R is 1-4C alkyl or aryl and m is 0 to 2 and (B) a metal alkoxide or aryloxide compound expressed by the formula M(OR min )n wherein M is Mg, B, P, Zr, Y, Ti or Ba, R min is 1-4C alkyl or aryl and n is a valence of the metal atom to hydrolysis and condensation using a catalyst in the presence of a solvent.
IPC 1-7
IPC 8 full level
C08G 77/48 (2006.01); C08G 77/58 (2006.01); C08G 79/00 (2006.01); C09D 183/00 (2006.01); C09D 183/04 (2006.01); C09D 183/14 (2006.01); C09D 185/00 (2006.01); C23C 18/12 (2006.01); H01L 21/31 (2006.01); H01L 21/312 (2006.01); H01L 23/29 (2006.01); H01L 23/31 (2006.01)
CPC (source: EP)
C23C 18/1212 (2013.01)
Designated contracting state (EPC)
BE DE GB LU NL
DOCDB simple family (publication)
EP 0327311 A2 19890809; EP 0327311 A3 19900801; EP 0327311 B1 19940914; DE 68918124 D1 19941020; DE 68918124 T2 19950223; JP H021778 A 19900108; JP H0559154 B2 19930830
DOCDB simple family (application)
EP 89300927 A 19890131; DE 68918124 T 19890131; JP 2204189 A 19890131