EP 0340861 A1 19891108 - Auger spectrometry.
Title (en)
Auger spectrometry.
Title (de)
Auger-Spektrometrie.
Title (fr)
Spectrométrie Auger.
Publication
Application
Priority
NL 8801163 A 19880504
Abstract (en)
An objective lens in an electron microscope is adapted to detection of Auger electrons. Using an additional lens field, preferably including the use of a VAIL lens, the electrons to be detected are spiraled to a selection space. Between the lens field and the selection space a preferably displaceable, magnetic diaphragm is arranged for the separation of lens fields.
IPC 1-7
IPC 8 full level
G01N 23/225 (2006.01); G01Q 30/06 (2010.01); H01J 37/09 (2006.01); H01J 37/141 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/252 (2006.01); H01J 37/256 (2006.01)
CPC (source: EP US)
H01J 37/09 (2013.01 - EP US); H01J 37/141 (2013.01 - EP US); H01J 37/256 (2013.01 - EP US); H01J 2237/142 (2013.01 - EP US)
Citation (search report)
- [A] EP 0259907 A1 19880316 - PHILIPS NV [NL]
- [A] US 3818394 A 19740618 - KIMURA H, et al
- [A] EP 0129681 A2 19850102 - IBM [US]
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 0340861 A1 19891108; JP H0249342 A 19900219; NL 8801163 A 19891201; US 5003172 A 19910326
DOCDB simple family (application)
EP 89201105 A 19890428; JP 11274089 A 19890501; NL 8801163 A 19880504; US 34419589 A 19890427