EP 0343530 B1 20011114 - Vacuum installation
Title (en)
Vacuum installation
Title (de)
Vakuumanlage
Title (fr)
Installation sous vide
Publication
Application
Priority
- CH 195188 A 19880524
- CH 272288 A 19880715
Abstract (en)
[origin: EP0343530A2] The vacuum installation for treating disc-type workpieces has a central distributor chamber (7) into which the workpieces are introduced from a lock through a communicating opening, which can be closed by means of a closure element (8), with the aid of a transfer mechanism (10, 11, 12), preferably in the form of a robot arm, disposed in the distributor chamber. Intermediate chambers (15) which are distributed over the circumference of the distributor chamber (7), furthermore adjoin the same as replaceable modules, it being possible to close the communication between the latter at every connecting point by a closure element (14). An intermediate chamber (15) communicates with at least one process chamber (24, 25) via an associated communication opening (22, 23), which latter can be opened for the purpose of separating the process chamber from the intermediate chamber. Disposed in the intermediate chamber (15) is a further transfer mechanism (20, 21) for the purpose of receiving the workpieces from the first transfer mechanism (10, 11, 12) which deposits the workpieces on an elevating platform (26, 27) disposed underneath a processing chamber (24, 25). The elevating platform introduces the workpiece into the associated process chamber and at the same time isolates the latter from the distributor chamber (15) in doing so. Preferably, a plurality of process chambers is assigned to every intermediate chamber (15). The closure elements (8, 14, 26, 27) at the communication openings between the chambers (7, 15, 24, 25) are controlled while the processes are being carried out in a manner such that no undesirable leakage of gases or particles from one process chamber into the other can take place. <IMAGE>
IPC 1-7
IPC 8 full level
B05C 11/08 (2006.01); B05C 13/00 (2006.01); B65G 49/00 (2006.01); B65G 49/07 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01); H01L 21/3065 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP US)
H01L 21/67167 (2013.01 - EP US); H01L 21/6719 (2013.01 - EP US); H01L 21/68707 (2013.01 - EP US); Y10S 414/135 (2013.01 - EP US); Y10S 414/137 (2013.01 - EP US); Y10S 414/139 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH DE ES FR GB GR IT LI LU NL SE
DOCDB simple family (publication)
EP 0343530 A2 19891129; EP 0343530 A3 19901227; EP 0343530 B1 20011114; AT E208961 T1 20011115; DE 58909880 D1 20011220; ES 2163388 T3 20020201; JP 2005167270 A 20050623; JP 3121602 B2 20010109; JP 3455468 B2 20031014; JP 4012941 B2 20071128; JP H0297035 A 19900409; JP H11145252 A 19990528; JP H11345860 A 19991214; US 4990047 A 19910205; US 5090900 A 19920225
DOCDB simple family (application)
EP 89109054 A 19890519; AT 89109054 T 19890519; DE 58909880 T 19890519; ES 89109054 T 19890519; JP 10972699 A 19990416; JP 12901389 A 19890524; JP 2005005068 A 20050112; JP 26155098 A 19980916; US 35687289 A 19890524; US 57746290 A 19900904