EP 0349577 B1 19941130 - AN OPTIMALLY STAGED CRYOPUMP.
Title (en)
AN OPTIMALLY STAGED CRYOPUMP.
Title (de)
OPTIMAL GESTUFTE KRYOPUMPE.
Title (fr)
CRYOPOMPE A ETAGEMENT OPTIMAL.
Publication
Application
Priority
- US 737087 A 19870127
- US 8800225 W 19880127
Abstract (en)
[origin: WO8805500A1] A cryopump having at least two temperature stages (20, 32) for pumping gases at their optimal temperatures. A first embodiment has a third temperature stage (36) that is surrounded by and separated from the second temperature stage (32) which is surrounded by and separated from the first temperature stage (20). Adsorbent (34, 36) placed on the second and third stages are operated at different temperatures to prevent gases with higher critical mobility temperatures from becoming immobilized at the entrance of pores and wells along the surface of the adsorbent. Another embodiment has at least a second stage (32), a temperature sensor (46), and a heater (44) to maintain the second stage (32) temperature at the optimal level for the gas being pumped.
IPC 1-7
IPC 8 full level
F04B 37/08 (2006.01)
CPC (source: EP)
F04B 37/08 (2013.01)
Citation (examination)
- GB 2127493 A 19840411 - BALZERS HOCHVAKUUM
- US 4614093 A 19860930 - BAECHLER WERNER [DE], et al
Designated contracting state (EPC)
CH DE FR GB IT LI NL
DOCDB simple family (publication)
WO 8805500 A1 19880728; CA 1315111 C 19930330; DE 3852303 D1 19950112; DE 3852303 T2 19950518; EP 0349577 A1 19900110; EP 0349577 B1 19941130; JP 2597696 B2 19970409; JP H02502034 A 19900705
DOCDB simple family (application)
US 8800225 W 19880127; CA 557461 A 19880127; DE 3852303 T 19880127; EP 88902995 A 19880127; JP 50277388 A 19880127