EP 0387838 A3 19910515 - APPARATUS FOR PRODUCING A PLASMA SOURCE HAVING A HIGHER RADIATION INTENSITY IN THE X-RAY RANGE
Title (en)
APPARATUS FOR PRODUCING A PLASMA SOURCE HAVING A HIGHER RADIATION INTENSITY IN THE X-RAY RANGE
Publication
Application
Priority
DE 3908480 A 19890315
Abstract (en)
[origin: EP0387838A2] An apparatus for producing a plasma source having a high radiation intensity in the X-ray range, having two concentric electrodes (10, 11) which have a discharge space (12) between them, filled with a gas at low pressure, which discharge space (12) is open at one end (13) and is closed by an insulator (15) at the other end (14), which has a surface (16) allowing a homogeneous plasma layer to build up, and having a high-power switch (HS), which connects the electrodes (10, 11) to a high-voltage source for a brief period. In order to achieve a long life of the insulator (15) of the apparatus, said apparatus is designed such that the insulator (15) is an annular disc and adjoins the discharge space (12) with a surface (16) which is at right angles or inclined at a maximum of 45 DEG with respect to the cylinder vertical (18), and such that the electrodes (10, 11) are arranged at a distance (25) from one another allowing multiplication of the electrons in a homogeneous discharge. <IMAGE>
IPC 1-7
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP)
H05G 2/003 (2013.01)
Citation (search report)
- [A] US 4715054 A 19871222 - KATO YASUO [JP], et al
- [A] EP 0140005 A2 19850508 - ZEISS CARL FA [DE], et al
- [A] EP 0037917 A1 19811021 - IBM [US]
- [AP] US 4841556 A 19890620 - KATO YASUO [JP], et al
- [A] INSTRUMENTS & EXPERIMENTAL TECHNIQUES, Band 31, Nr. 1, Januar/Februar 1988, Seiten 221-223, New York, US; R.B. BAKSHT et al.: "Compact plasma source of soft X-rays"
Designated contracting state (EPC)
AT CH DE FR GB IT LI NL
DOCDB simple family (publication)
EP 0387838 A2 19900919; EP 0387838 A3 19910515; DE 3908480 C1 19900809
DOCDB simple family (application)
EP 90104819 A 19900314; DE 3908480 A 19890315