EP 0391996 A4 19910731 - TEMPERATURE CONTROLLED DISTRIBUTOR BEAM FOR CHEMICAL VAPOR DEPOSITION
Title (en)
TEMPERATURE CONTROLLED DISTRIBUTOR BEAM FOR CHEMICAL VAPOR DEPOSITION
Publication
Application
Priority
US 24544488 A 19880916
Abstract (en)
[origin: WO9002826A1] A distributor beam (35) for depositing coating material on the surface of a sheet of glass (34) includes a plenum (58) for each gas to be mixed. The plenums (58) are surrounded by a cooling fluid duct (36, 40, 44-46) and heating elements (84, 85) are provided for temperature control. Thermocouples (92, 95-99) generate signals representing actual temperatures and the heaters (84, 85) are controlled to maintain an optimum temperature for the gases as they flow from the plenums (58) through a mixing chamber (67) to the surface of the glass sheet (34) which is located below an outlet (70) from the mixing chamber (67). Fastener means (48b, 51b, 64b) apply increased clamping pressure to the beam structure as the temperature increases to increase the rate of heat transfer to the cooling fluid.
IPC 1-7
IPC 8 full level
C03C 17/245 (2006.01); C03C 17/00 (2006.01); C23C 16/44 (2006.01); C23C 16/453 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01)
CPC (source: EP KR)
C03C 17/002 (2013.01 - EP); C23C 16/00 (2013.01 - KR); C23C 16/453 (2013.01 - EP)
Citation (search report)
See references of WO 9002826A1
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI LU NL SE
DOCDB simple family (publication)
WO 9002826 A1 19900322; AU 4308489 A 19900402; AU 618412 B2 19911219; BR 8907091 A 19910108; CA 1332281 C 19941011; EP 0391996 A1 19901017; EP 0391996 A4 19910731; ES 2015459 A6 19900816; FI 902414 A0 19900515; JP H03501474 A 19910404; KR 900702073 A 19901205; MX 171806 B 19931115; TW 239165 B 19950121
DOCDB simple family (application)
US 8903939 W 19890912; AU 4308489 A 19890912; BR 8907091 A 19890912; CA 610445 A 19890906; EP 89910701 A 19890912; ES 8903138 A 19890915; FI 902414 A 19900515; JP 51012689 A 19890912; KR 900701014 A 19900516; MX 1755689 A 19890914; TW 78107044 A 19890913