EP 0403537 A4 19910911 - ULTRASONIC POLISHING
Title (en)
ULTRASONIC POLISHING
Publication
Application
Priority
- US 16650288 A 19880310
- US 30576889 A 19890203
Abstract (en)
[origin: WO8908535A1] Ultrasonic polishing without substantial loss of fine resolution and detail is provided by employing a tool (2) of a more ultrasonically abradable material than the workpiece, (4) as the oscillating driver of a liquid abrasive slurry. The tool is preferentially eroded and conforms to the pattern of the workpiece continuous self-dressing during polishing.
IPC 1-7
IPC 8 full level
B24B 1/04 (2006.01); B24B 35/00 (2006.01)
CPC (source: EP KR)
B24B 1/04 (2013.01 - EP KR); B24B 35/005 (2013.01 - EP)
Citation (search report)
- No further relevant documents have been disclosed.
- See references of WO 8908535A1
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI LU NL SE
DOCDB simple family (publication)
WO 8908535 A1 19890921; AU 3219389 A 19891005; AU 619263 B2 19920123; DE 68910115 D1 19931125; DE 68910115 T2 19940217; EP 0403537 A1 19901227; EP 0403537 A4 19910911; EP 0403537 B1 19931020; JP 2691787 B2 19971217; JP H03504108 A 19910912; KR 900700238 A 19900811; KR 930012261 B1 19931228; RU 1836206 C 19930823
DOCDB simple family (application)
US 8900962 W 19890310; AU 3219389 A 19890310; DE 68910115 T 19890310; EP 89903596 A 19890310; JP 50336389 A 19890310; KR 890702077 A 19891108; SU 4831512 A 19900907