EP 0406886 A2 19910109 - Field-emission type switching device and method of manufacturing it.
Title (en)
Field-emission type switching device and method of manufacturing it.
Title (de)
Unter Feldeffekt-Emission arbeitende Schaltanordnung und deren Herstellungsverfahren.
Title (fr)
Dispositif de commutation utilisant l'émission par effet de champ et son procédé de fabrication.
Publication
Application
Priority
JP 17590089 A 19890707
Abstract (en)
A field-emission type switching device includes a substrate (1, 2; 11) formed with a recess (6; 15) having a straight edge and serrated edge opposite to the straight edge. A gate electrode (5; 14) is formed at the bottom of the recess (6; 15). An emitter electrode (3, 12) is provided over the substrate (1, 2; 11) and formed with a serrated edge which is slightly off alignment with the serrate edge of the recess (6; 15) so as to provide an emitter overhanging portion (3a) overhanging the recess (6;15). Similarly, a collector electrode (4, 13) is provided over the substrate means (1, 2; 11) and formed with a straight edge which is slightly off alignment with the straight edge of the recess (6; 15) so as to provide a collector overhanging portion (4a) overhanging the recess (6; 15).
IPC 1-7
IPC 8 full level
H01J 9/02 (2006.01); H01J 3/02 (2006.01); H01J 19/24 (2006.01); H01J 19/38 (2006.01); H01J 21/10 (2006.01); H01L 29/66 (2006.01)
CPC (source: EP)
H01J 3/022 (2013.01); H01J 21/105 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0406886 A2 19910109; EP 0406886 A3 19910327; EP 0406886 B1 19941214; DE 69015024 D1 19950126; DE 69015024 T2 19950727; JP H0340332 A 19910221
DOCDB simple family (application)
EP 90112938 A 19900706; DE 69015024 T 19900706; JP 17590089 A 19890707