EP 0417951 B1 19940615 - Fe-Si-Al alloy magnetic thin film and method of manufacturing the same.
Title (en)
Fe-Si-Al alloy magnetic thin film and method of manufacturing the same.
Title (de)
Dünner magnetischer Film aus Fe-Si-Al-Legierung und Herstellungsverfahren.
Title (fr)
Film mince magnétique en alliage Fe-Si-Al et méthode de fabrication.
Publication
Application
Priority
- JP 4952790 A 19900302
- JP 14026190 A 19900530
- JP 23662489 A 19890912
Abstract (en)
[origin: EP0417951A2] A Fe-Si-A l alloy magnetic thin film contains a limited oxygen content in the range 0.17 to 0.46 wt % and has excellent magnetic and mechanical properties. The film is made by sputtering in an inert gas atmosphere containing a controlled concentration of oxygen amounting to 400 to 1500 volumetric ppm if the sputtering target is a cast film, while the oxygen content is reduced by an amount dependent on the initial concentration of oxygen in the sputtering target when the target is a sintered target containing oxygen.
IPC 1-7
IPC 8 full level
C22C 38/00 (2006.01); C23C 14/40 (2006.01); H01F 10/14 (2006.01); H01F 41/18 (2006.01)
CPC (source: EP)
H01F 10/145 (2013.01); H01F 41/18 (2013.01); H01F 41/183 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0417951 A2 19910320; EP 0417951 A3 19920122; EP 0417951 B1 19940615; DE 69009917 D1 19940721; DE 69009917 T2 19941020; JP H03278408 A 19911210; JP H088169 B2 19960129
DOCDB simple family (application)
EP 90309606 A 19900903; DE 69009917 T 19900903; JP 14026190 A 19900530