EP 0425012 B1 19930414 - BATHS AND PROCESS FOR CHEMICAL POLISHING OF COPPER AND COPPER ALLOY SURFACES
Title (en)
BATHS AND PROCESS FOR CHEMICAL POLISHING OF COPPER AND COPPER ALLOY SURFACES
Publication
Application
Priority
BE 8901150 A 19891024
Abstract (en)
[origin: US5098517A] Baths for chemical polishing of copper or copper alloy surfaces, comprising, in aqueous solution, hydrogen peroxide, phosphoric acid and tetraborate ions.
IPC 1-7
IPC 8 full level
CPC (source: EP KR US)
Citation (examination)
Protection of Metals, vol. 25, no. 2 (mars/avril 1989), page 257; New York, US, A.I.Turashev.
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IT LI LU NL SE
DOCDB simple family (publication)
EP 0425012 A1 19910502; EP 0425012 B1 19930414; AT E88223 T1 19930415; BE 1003761 A3 19920609; CA 2028195 A1 19910425; DE 69001349 D1 19930519; FI 905229 A0 19901024; JP H03193886 A 19910823; KR 910008167 A 19910530; NO 904579 D0 19901023; NO 904579 L 19910425; US 5098517 A 19920324
DOCDB simple family (application)
EP 90202734 A 19901015; AT 90202734 T 19901015; BE 8901150 A 19891024; CA 2028195 A 19901022; DE 69001349 T 19901015; FI 905229 A 19901024; JP 28453390 A 19901024; KR 900016848 A 19901022; NO 904579 A 19901023; US 60261790 A 19901024