EP 0427186 A2 19910515 - Ink recording apparatus.
Title (en)
Ink recording apparatus.
Title (de)
Tintenaufzeichnungsvorrichtung.
Title (fr)
Appareil d'enregistrement par encre.
Publication
Application
Priority
JP 29289889 A 19891109
Abstract (en)
An ink recording apparatus used with printers or the like and manufactured by applying semiconductor device manufacturing techniques. One wall of an ink chamber (21b) is formed of a single-crystal substrate (21) and an ink jet port (21a) is formed by etching on the single-crystal substrate (21). A slider (25) and electrodes (24a to 24h) composed of polycrystalline-silicon film are formed on the single-crystal substrate by film forming in the LPCVD method and patterning through plasma etching. The slider (25) has a plurality of ink passing holes (25a to 25d) which have respectively different diameter, being driven by electrostatic attracting force produced between voltage-applied electrodes (24a to 24h) and the slider (25). The electrodes (24a to 24h) are formed at positions corresponding to those where the each ink passing hole (25a to 25d) is aligned with the ink jet port (21a).
IPC 1-7
IPC 8 full level
B41J 2/05 (2006.01); B41J 2/135 (2006.01); B41J 2/16 (2006.01); B41J 2/205 (2006.01)
CPC (source: EP US)
B41J 2/1607 (2013.01 - EP US); B41J 2/1628 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0427186 A2 19910515; EP 0427186 A3 19910904; EP 0427186 B1 19940622; DE 69010148 D1 19940728; DE 69010148 T2 19941013; JP 2756159 B2 19980525; JP H03151248 A 19910627; US 5077565 A 19911231
DOCDB simple family (application)
EP 90121177 A 19901106; DE 69010148 T 19901106; JP 29289889 A 19891109; US 61004790 A 19901106