EP 0445855 A1 19910911 - Improved turbomolecular pump.
Title (en)
Improved turbomolecular pump.
Title (de)
Verbesserte Turbomolekularpumpe.
Title (fr)
Pompe turbomoléculaire améliorée.
Publication
Application
Priority
IT 6716390 A 19900309
Abstract (en)
A turbomolecular pump comprising, in addition to usual axial flow pumping stages consisting of alternated rotors (1,1a) and stators (2,2a), one or more tangential flow pumping stages (10;30) arranged at the exhaust side of the pump, to raise up the compression ratio. Each axial flow stage consists of a plane disk rotor (12;35) encompassed to a coplanar annular stator (13;36), spaced apart from the rotor disk, so that a free annular channel is formed in-between (14;38), in which channel the pumped gases move along a tangential flow. Such channel is closed by a baffle (15;39), and communicates with a suction port (17;40) and a discharge port (18;41). The plane disk rotor may be provided of vanes (37,37a,37b). It is possible to combine tangential flow stages (10) having rotor without vanes (12) and tangential flow stages (30) having rotor with vanes (35); in such a way it is possible to raise the exhaust pressure up to the atmospheric pressure, and to discharge directly in the atmosphere. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 23/00 (2006.01); F04D 25/16 (2006.01)
CPC (source: EP)
F04D 17/168 (2013.01); F04D 19/042 (2013.01); F04D 23/008 (2013.01)
Citation (search report)
- [X] DE 3919529 A1 19900118 - OSAKA VACUUM LTD [JP]
- [Y] EP 0226039 A1 19870624 - HITACHI LTD [JP]
- [Y] US 4735550 A 19880405 - OKAWADA TAKESHI [JP], et al
- [A] US 3628894 A 19711221 - FERGUSON JOHN H JR, et al
- [A] FR 1443239 A 19660624
- [A] DE 239213 C
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IT LI LU NL SE
DOCDB simple family (publication)
EP 0445855 A1 19910911; EP 0445855 B1 19941026; AT E113343 T1 19941115; DE 69104749 D1 19941201; DE 69104749 T2 19950330; ES 2064873 T3 19950201; HK 1000016 A1 19971003; IT 1241431 B 19940117; IT 9067163 A0 19900309; IT 9067163 A1 19910909; JP H04224295 A 19920813; JP H0826877 B2 19960321
DOCDB simple family (application)
EP 91200302 A 19910213; AT 91200302 T 19910213; DE 69104749 T 19910213; ES 91200302 T 19910213; HK 97101526 A 19970709; IT 6716390 A 19900309; JP 4360191 A 19910308