EP 0445930 B1 19941102 - Lithium niobate etchant.
Title (en)
Lithium niobate etchant.
Title (de)
Ätzmittel für Lithiumniobat.
Title (fr)
Réactif d'attaque chimique pour niobate de lithium.
Publication
Application
Priority
US 48568990 A 19900227
Abstract (en)
[origin: EP0445930A1] Oxides of a tantalum and niobium are selectively etched using patterned silicon oxide deposited by a low-temperature chemical vapor deposition as a mask and a sulfate flux to selectively remove exposed portions of the tantalum or niobium oxide substrate.
IPC 1-7
IPC 8 full level
C30B 33/10 (2006.01); C04B 41/53 (2006.01); C04B 41/91 (2006.01); C09K 13/00 (2006.01); G02B 6/13 (2006.01); G02B 6/136 (2006.01); G02F 1/035 (2006.01); G02F 1/05 (2006.01); H01L 41/24 (2006.01)
CPC (source: EP)
C04B 41/5361 (2013.01); C04B 41/91 (2013.01); C09K 13/00 (2013.01); G02B 6/136 (2013.01); H10N 30/082 (2023.02)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0445930 A1 19910911; EP 0445930 B1 19941102; DE 69104870 D1 19941208; DE 69104870 T2 19950316; JP H04214100 A 19920805
DOCDB simple family (application)
EP 91301286 A 19910219; DE 69104870 T 19910219; JP 3125591 A 19910227