EP 0459773 B1 20010404 - Method of producing a semiconductor integrated circuit having complementary field effect transistors
Title (en)
Method of producing a semiconductor integrated circuit having complementary field effect transistors
Title (de)
Verfahren zur Herstellung einer integrierten Halbleiterschaltungsanordnung mit komplementären Feldeffekttransistoren
Title (fr)
Procédé de réalisation d'un circuit semiconducteur intégré à transistors complémentaires à effet de champ
Publication
Application
Priority
JP 13961290 A 19900531
Abstract (en)
[origin: EP0459773A2] A semiconductor device, wherein an electrode wiring, which is in contact with semiconductor layers of mutually different conductive types and serves to connect at least the layers of mutually different conductive types, comprises a first portion principally composed of a component same as the principal component of the semiconductor layers, and a second portion consisting of a metal. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 23/52 (2006.01); C23C 14/56 (2006.01); C23C 16/04 (2006.01); H01L 21/28 (2006.01); H01L 21/3205 (2006.01); H01L 21/8238 (2006.01); H01L 23/532 (2006.01); H01L 29/49 (2006.01)
CPC (source: EP US)
C23C 14/568 (2013.01 - EP US); C23C 16/04 (2013.01 - EP US); H01L 21/823842 (2013.01 - EP US); H01L 21/823871 (2013.01 - EP US); H01L 23/53271 (2013.01 - EP US); H01L 29/4925 (2013.01 - EP US); H01L 29/4933 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US); Y10S 148/02 (2013.01 - EP US)
C-Set (source: EP US)
Citation (examination)
- EP 0098737 A2 19840118 - FUJITSU LTD [JP]
- DE 2537564 A1 19760311 - CENTRE ELECTRON HORLOGER
- US 4328261 A 19820504 - HEINECKE RUDOLF A H, et al
- PATENT ABSTRACTS OF JAPAN vol. 08, no. 155 (E - 256) 19 July 1984 (1984-07-19)
- HANABUSA ET AL.: "Photochemical Vapor Deposition of Aluminum Thin Films Using Dimethylaluminum Hydride", J.J. APPL. PHYS., vol. 27, no. 8, August 1988 (1988-08-01), TOKYO, pages L1392 - L1394, XP000118488
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IT LI LU NL SE
DOCDB simple family (publication)
EP 0459773 A2 19911204; EP 0459773 A3 19920603; EP 0459773 B1 20010404; AT E200365 T1 20010415; DE 69132569 D1 20010510; DE 69132569 T2 20010830; JP 2895166 B2 19990524; JP H0434922 A 19920205; US 5218232 A 19930608; US 5700719 A 19971223
DOCDB simple family (application)
EP 91304831 A 19910529; AT 91304831 T 19910529; DE 69132569 T 19910529; JP 13961290 A 19900531; US 41404995 A 19950330; US 70559691 A 19910524