EP 0460701 A1 19911211 - A method of forming a corrosion-resistant protective coating on aluminum substrate.
Title (en)
A method of forming a corrosion-resistant protective coating on aluminum substrate.
Title (de)
Verfahren zur Herstellung eines korrosionsbeständigen Schutzüberzugs auf Aluminiumsubstrat.
Title (fr)
Procédé de formation d'un revêtement protecteur résistant à la corrosion sur un substrat d'aluminium.
Publication
Application
Priority
- US 53479690 A 19900607
- US 53480790 A 19900607
Abstract (en)
A corrosion-resistant protective coating on an aluminum substrate is capable of withstanding corrosion attack by process halogen gases and plasmas. The protective coating is formed by contacting an aluminum oxide layer on an aluminum substrate with one or more fluorine-containing gases at an elevated temperature. In a preferred embodiment, a high purity corrosion-resistant protective coating on an aluminum substrate capable of withstanding corrosion attack is formed by first forming a high purity aluminum oxide layer on the aluminum substrate and then contacting the aluminum oxide layer with one or more high purity fluorine-containing gases at an elevated temperature to form the high purity corrosion resistant protective coating thereon.
IPC 1-7
IPC 8 full level
C23C 8/34 (2006.01); C23C 8/80 (2006.01); C25D 11/18 (2006.01)
CPC (source: EP)
C23C 8/34 (2013.01); C23C 8/80 (2013.01); C25D 11/18 (2013.01)
Citation (search report)
[X] US 4111762 A 19780905 - WADE JACKIE F, et al
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 0460701 A1 19911211; EP 0460701 B1 19980304; DE 69125651 D1 19970522; DE 69125651 T2 19970904; DE 69128982 D1 19980409; DE 69128982 T2 19980827; EP 0460700 A1 19911211; EP 0460700 B1 19970416
DOCDB simple family (application)
EP 91109363 A 19910607; DE 69125651 T 19910607; DE 69128982 T 19910607; EP 91109362 A 19910607